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Effects of spatial sensitivity on mass sensing with bulk acoustic mode resonators

Accepted version
Peer-reviewed

Repository DOI


Type

Article

Change log

Authors

Prasad, A 
Seshia, AA 
Kalberer, M 
Jones, RL 

Abstract

The spatial sensitivity of bulk acoustic mode resonators can influence calibrations when they are implemented as accurate mass sensors of surface-bound particles. A new spatial sensitivity model based on images of the resonator surface is introduced from early principles. The adsorption of particles was studied empirically by repeatedly drying particle laden droplets on the surface of two 3.14 MHz bulk acoustic mode resonators. Theoretical and experimental results were compared to identify three scenarios over the course of consecutive droplet evaporation with varying spatial sensitivity influences. Examining different surface treatments for the resonators revealed the hydrophilic surface to have a higher rate of particle stacking and conglomeration.

Description

Keywords

Spatial sensitivity, Bulk Acoustic Wave (BAW), Bulk Acoustic Mode Resonator, Particulate Mass Sensor, MEMS, Mathematical modelling

Journal Title

Sensors and Actuators, A: Physical

Conference Name

Journal ISSN

0924-4247
1873-3069

Volume Title

236

Publisher

Elsevier BV
Sponsorship
Natural Environment Research Council (NE/I007490/1)
ATZ thanks the Natural Sciences and Engineering Research Council of Canada, the Sir Winston Churchill Society of Edmonton, and the Cambridge Trust for funding of the PhD degree.