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Microfluidic devices fabricated using fast wafer-scale LED-lithography patterning

Accepted version
Peer-reviewed

Type

Article

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Authors

Challa, PK 
Kartanas, T 
Charmet, J 
Knowles, TPJ 

Abstract

Current lithography approaches underpinning the fabrication of microfluidic devices rely on UV exposure of photoresists to define microstructures in these materials. Conventionally, this objective is achieved with gas discharge mercury lamps, which are capable of producing high intensity UV radiation. However, these sources are costly, have a comparatively short lifetime, necessitate regular calibration, and require significant time to warm up prior to exposure taking place. To address these limitations we exploit advances in solid state sources in the UV range and describe a fast and robust wafer-scale laboratory exposure system relying entirely on UV-Light emitting diode (UV-LED) illumination. As an illustration of the potential of this system for fast and low-cost microfluidic device production, we demonstrate the microfabrication of a 3D spray-drying microfluidic device and a 3D double junction microdroplet maker device.

Description

Keywords

0912 Materials Engineering, Climate-Related Exposures and Conditions

Journal Title

Biomicrofluidics

Conference Name

Journal ISSN

1932-1058
1932-1058

Volume Title

11

Publisher

AIP
Sponsorship
European Research Council (337969)
This work was supported by the ERC, the BBSRC, the EPSRC, the Welcome Trust and the Newman Foundation.