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Zinc tin oxide thin film transistors produced by a high rate reactive sputtering: Effect of tin composition and annealing temperatures

Accepted version
Peer-reviewed

Type

Article

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Authors

Niang, KM 
Cho, J 
Milne, WI 
Friend, RH 

Abstract

Amorphous zinc tin oxides (a-ZTO), which are stoichiometrically close to the Zn2SnO4 and ZnSnO3 phases, have been deposited using remote-plasma reactive sputtering, and incorporated as the channel layers in thin film transistors (TFTs). The influence of tin composition and annealing temperatures on the structural and phase evolutions of the thin films, and the electrical performances of the TFTs are investigated. Zn2SnO4 exhibited randomly oriented polycrystalline peaks at annealing temperatures ≥700 °C, while ZnSnO3 decomposed into Zn2SnO4 and SnO2 at 950 °C. TFTs employing a Zn2SnO4 channel, after a post-deposition annealing at 500 °C, exhibited a field effect mobility ~14 cm2 V−1 s−1 and a sub-threshold slope ~0.6 V dec−1. When the tin content was increased in the channel, as in ZnSnO3, TFTs exhibited an increase in field effect mobility ~20 cm2 V−1 s−1, but with a slight deterioration of sub-threshold slope to ~0.8 V dec−1. When the post-deposition annealing temperature was reduced to 300 °C, a mobility as high as ~10 cm2 V−1 s−1 was still achieved, however, a significant shoulder in the IDS–VGS curve, together with a higher off-state current was observed. TFT characteristics are explained by the sub-bandgap defect states measured by photothermal deflection spectroscopy and the extracted Urbach energies.

Description

Keywords

annealing, indium, oxides, sputtering, thin film transistors, zinc tin oxide

Journal Title

Physica Status Solidi (A) Applications and Materials Science

Conference Name

Journal ISSN

1862-6300
1862-6319

Volume Title

214

Publisher

Wiley
Sponsorship
Engineering and Physical Sciences Research Council (EP/M013650/1)
Engineering and Physical Sciences Research Council (EP/M023532/1)
The support of this work by the Engineering and Physical Sciences Research Council (EPSRC) through project EP/M013650/1 is acknowledged. A.S. and R.H.F. would like to acknowledge funding and active support from EPSRC and India-UK APEX project. K.M.N. thanks Dr. S. Thornley of PlasmaQuest for providing the metallic tin target.