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A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors

Accepted version
Peer-reviewed

Type

Article

Change log

Authors

Pandit, M 
Sun, B 
Sobreviela, G 
Zou, X 

Abstract

This letter presents the first experimental results on the closed-loop characterization of a mode-localized microelectromechanical resonator system. Comparisons between the closed-loop oscillator approach and the open-loop frequency sweep approach show good agreement of output metrics including the amplitude ratios and mode frequencies. This new approach enables real-time measurements using emerging mode-localized resonant sensors and represents an important step toward realizing sensors based on this measurement principle.

Description

Keywords

mode localized resonant sensor, self-sustained oscillator

Journal Title

Journal of Microelectromechanical Systems

Conference Name

Journal ISSN

1057-7157
1941-0158

Volume Title

26

Publisher

IEEE
Sponsorship
Natural Environment Research Council (NE/N012097/1)
Funding from Innovate UK and the Natural Environment Research Council is gratefully acknowledged.