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Particulate mass sensing with piezoelectric bulk acoustic mode resonators

Accepted version
Peer-reviewed

Type

Conference Object

Change log

Authors

Zielinski, AT 
Jones, RL 
Prasad, A 
Seshia, AA 

Abstract

© 2016 IEEE.Current portable particle detection instruments typically rely on optical methods which are limited to 100 nm diameter particles. Microfabricated bulk acoustic resonators, when used as mass balances, could take particle detection below this limit. This study examines the collection of particles onto piezoelectric bulk acoustic mode resonators from gaseous flow using classical impaction. Collection of both polystyrene latex particles and α-pinene secondary organic aerosol particles was examined in terms of frequency shift and collection efficiency. A new experimental setup was introduced which allows for adjusting major impactor, resonator, and aerosol properties. Preliminary results show the setup works for both particles while the saturation limit was not reached within an hour despite highly elevated particle concentrations.

Description

Keywords

MEMS resonators, particle collection, impactor, piezoelectric, square extensional mode

Journal Title

2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings

Conference Name

2016 IEEE International Frequency Control Symposium (IFCS)

Journal ISSN

1075-6787

Volume Title

Publisher

IEEE