A high-accuracy space smart payload integrated with attitude and position (SSPIAP) is a new type of optical remote sensor that can autonomously complete image positioning. Inner orientation parameters (IOPs) are a prerequisite for image position determination of an SSPIAP. The calibration of IOPs significantly influences the precision of image position determination of SSPIAPs. IOPs can be precisely measured and calibrated in a laboratory. However, they may drift to a significant degree because of vibrations during complicated launches and on-orbit functioning. Therefore, laboratory calibration methods are not suitable for on-orbit functioning. We propose an on-orbit self-calibration method for SSPIAPs. Our method is based on an auto-collimating dichroic filter combined with a micro-electro-mechanical system (MEMS) point-source focal plane. A MEMS procedure is used to manufacture a light transceiver focal plane, which integrates with point light sources and a complementary metal oxide semiconductor (CMOS) sensor. A dichroic filter is used to fabricate an auto-collimation light reflection element. The dichroic filter and the MEMS point light sources focal plane are integrated into an SSPIAP so it can perform integrated self-calibration. Experiments show that our method can achieve micrometer-level precision, which is good enough to complete real-time calibration without temporal or spatial limitations.