Pulse energy packing effects on material transport during laser processing of < 1
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Peer-reviewed
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Abstract
The effects of energy pulse packing on material transport during single-pulse laser processing of < 1 | 1 | 1 > silicon is studied using temporarily shaped pulses with durations from 50 to 150 ns. Six regimes of material transport were identified and disambiguated through energy packing considerations over a range of pulse durations. Energy packing has been shown to shift the interaction to energetically costlier regimes without appreciable benefit in either depth, material removal or crater morphology and quality.
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Keywords
40 Engineering, 5110 Synchrotrons and Accelerators, 51 Physical Sciences, 7 Affordable and Clean Energy
Journal Title
Applied Physics A: Materials Science and Processing
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Journal ISSN
0947-8396
1432-0630
1432-0630
Volume Title
124
Publisher
Springer Science and Business Media LLC
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Sponsorship
EPSRC (via University of Southampton) (165826)
Engineering and Physical Sciences Research Council (EP/K030884/1)
Engineering and Physical Sciences Research Council (EP/K030884/1)
The authors would like to thank the UK Technology Strategy Board under project TP14/HVM/6/I/BD5665. The authors acknowledge the EPSRC Centre for Doctoral Training in Photonic Systems Development for their generous support.