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Porous AlGaN-Based Ultraviolet Distributed Bragg Reflectors.

Published version
Peer-reviewed

Type

Article

Change log

Authors

Oliver, Rachel 

Abstract

Utilising dislocation-related vertical etching channels in gallium nitride, we have previously demonstrated a simple electrochemical etching (ECE) process that can create layered porous GaN structures to form distributed Bragg reflectors for visible light at wafer scale. Here, we apply the same ECE process to realise AlGaN-based ultraviolet distributed Bragg reflectors (DBRs). These are of interest because they could provide a pathway to non-absorbing UV reflectors to enhance the performance of UV LEDs, which currently have extremely low efficiency. We have demonstrated porous AlGaN-based UV DBRs with a peak reflectance of 89% at 324 nm. The uniformity of these devices is currently low, as the as-grown material has a high density of V-pits and these alter the etching process. However, our results indicate that if the material growth is optimised, the ECE process will be useful for the fabrication of UV reflectors.

Description

Keywords

electrochemistry, nitride, porous

Journal Title

Materials (Basel)

Conference Name

Journal ISSN

1996-1944
1996-1944

Volume Title

11

Publisher

MDPI AG
Sponsorship
Engineering and Physical Sciences Research Council (EP/R511675/1)
Engineering and Physical Sciences Research Council (EP/M010589/1)
EPSRC (1645842)
Engineering and Physical Sciences Research Council (EP/M011682/1)
EPSRC (1645842)
Engineering and Physical Sciences Research Council (EP/R04502X/1)
Engineering and Physical Sciences Research Council (EP/L015455/1)