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Acoustic mode confinement using coupled cavity structures in UHF unreleased MEMS resonators

Published version
Peer-reviewed

Type

Article

Change log

Authors

Erbes, A 
Wang, W 
Weinstein, D 

Abstract

This papers investigates device approaches towards the confinement of acoustic modes in unreleased UHF MEMS resonators. Acoustic mode confinement is achieved using specially designed mechanically coupled acoustic cavities known as Acoustic Bragg Grating Coupler (ABGC) structures to spatially localize the vibration energy within the resonators and thereby improve the motional impedance (Rx) and mechanical quality factor (Q). This enhancement in the mechanical response is demonstrated with numerical simulations using distinct unreleased resonator technologies involving dielectric transduction mechanisms. These initial investigations show improvements in the Q as well as enhanced vibrational amplitudes within the resonator domains (i.e. translating to improved Rx values) in the case of coupled cavities as opposed to single cavity designs. An initial approach to fabricate the devices in a CMOS compatible dual-trench technology are presented.

Description

Keywords

40 Engineering, 4009 Electronics, Sensors and Digital Hardware, Bioengineering

Journal Title

Microsystem Technologies

Conference Name

Journal ISSN

0946-7076
1432-1858

Volume Title

25

Publisher

Springer Science and Business Media LLC
Sponsorship
Engineering and Physical Sciences Research Council (EP/K000314/1)
Engineering and Physical Sciences Research Council (EP/L010917/1)
Engineering and Physical Sciences Research Council (EP/I019308/1)
Engineering and Physical Sciences Research Council (EP/N021614/1)
Qualcomm European Research Studentship Fund in Technology US National Science Foundation