Integration of Au-SnO2 nanocomposites with power efficient MEMS substrate for acetone sensing
Accepted version
Peer-reviewed
Repository URI
Repository DOI
Change log
Authors
Santra, S
De Luca, Andrea https://orcid.org/0000-0002-9481-4747
Guha, PK
Udrea, Florin https://orcid.org/0000-0002-7288-3370
Ray, SK
Abstract
© 2017 IEEE. In this paper we report synthesis of Au-SnO2nanocomposites, and their integration on micro-hotplates through dip pen nano-lithography to realize a resistive acetone sensor device. The devices are power efficient (8.2°C temperature increase requires for 1 milli watt of power). The devices were characterized exposing acetone in presence of both dry and humid (40% RH) air. The response varies between 3.8 times (with 250 ppm) and 5.5 times (1000 ppm), and did not show much deterioration in presence of humidity.
Description
Keywords
micor-hotplate, acetone sensor, gold tin oxide
Journal Title
Proceedings of IEEE Sensors
Conference Name
2017 IEEE SENSORS
Journal ISSN
1930-0395
2168-9229
2168-9229
Volume Title
2017-December
Publisher
IEEE
Publisher DOI
Sponsorship
European Commission (611887)