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Integration of Au-SnO2 nanocomposites with power efficient MEMS substrate for acetone sensing

Accepted version
Peer-reviewed

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Type

Conference Object

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Authors

Santra, S 
Guha, PK 
Ray, SK 

Abstract

© 2017 IEEE. In this paper we report synthesis of Au-SnO2nanocomposites, and their integration on micro-hotplates through dip pen nano-lithography to realize a resistive acetone sensor device. The devices are power efficient (8.2°C temperature increase requires for 1 milli watt of power). The devices were characterized exposing acetone in presence of both dry and humid (40% RH) air. The response varies between 3.8 times (with 250 ppm) and 5.5 times (1000 ppm), and did not show much deterioration in presence of humidity.

Description

Keywords

micor-hotplate, acetone sensor, gold tin oxide

Journal Title

Proceedings of IEEE Sensors

Conference Name

2017 IEEE SENSORS

Journal ISSN

1930-0395
2168-9229

Volume Title

2017-December

Publisher

IEEE
Sponsorship
European Commission (611887)