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CMOS MEMS Hot-Film Thermoelectronic Flow Sensor

Accepted version
Peer-reviewed

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Type

Article

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Authors

Udrea, F 

Description

Keywords

Sensor phenomena, flow sensor, silicon-on-insulator, complementary metal-oxide semiconductor (CMOS), microelectromechanical system (MEMS), diode temperature sensor, wall shear stress

Journal Title

IEEE Sensors Letters

Conference Name

Journal ISSN

2475-1472
2475-1472

Volume Title

1

Publisher

Institute of Electrical and Electronics Engineers (IEEE)