Constant temperature operation of a CMOS MEMS thermoelectronic multidirectional flow sensor
Accepted version
Peer-reviewed
Repository URI
Repository DOI
Change log
Authors
Coull, JD
Abstract
© 2017 IEEE. In this paper we present the first CMOS MEMS thermoelectronic multidirectional flow sensor. We also introduce a Constant Temperature circuit based on diode thermal feedback and calibrate the sensor for 2D multidirectional wall shear stress measurements up to 2 Pa. The sensor electro-thermal transduction efficiency is 115 pW/°C. Average sensitivity is 250 mV/Pa at 225 °C operating temperature (Vd=0.55 V), and angular accuracy is below 5°.
Description
Keywords
4605 Data Management and Data Science, 46 Information and Computing Sciences, 40 Engineering
Journal Title
Proceedings of IEEE Sensors
Conference Name
2017 IEEE SENSORS
Journal ISSN
1930-0395
2168-9229
2168-9229
Volume Title
2017-December
Publisher
IEEE
Publisher DOI
Sponsorship
European Commission (288481)