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Diode-based CMOS MEMS thermal flow sensors

Accepted version
Peer-reviewed

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Type

Conference Object

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Authors

Falco, C 
Gardner, ELW 
Coull, JD 

Abstract

© 2017 IEEE. This paper reports on the intrinsic advantages of thermoelectronic flow sensors in comparison to their thermoresistive and thermoelectric counterparts. Hereafter, we will numerically and experimentally show that thermoelectronic flow sensors (i.e. thermal flow sensors employing p-n junction based devices as temperature sensors) benefit from the possibility of having the temperature sensor located in the hottest area of the heating element for enhanced convective effects and thus improved sensor sensitivity (Average Sensitivity +42%). Further improvements can be achieved by putting more diodes in series (Average Sensitivity +380%). A multidirectional thermoelectronic flow sensor is also reported.

Description

Keywords

Flow sensor, diode, CMOS, MEMS, high sensitivity

Journal Title

TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference Name

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Journal ISSN

Volume Title

Publisher

IEEE
Sponsorship
European Commission (288481)