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Smart CMOS mid-infrared sensor array.

Accepted version
Peer-reviewed

Type

Article

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Authors

Ali, Syed Zeeshan 
Dai, Ying 

Abstract

We present a novel single-chip thermopile sensor array for mid-infrared room temperature imaging. The array is fabricated on a single complementary metal-oxide-semiconductor (CMOS) dielectric membrane, composed of single-crystal silicon (Si) p+ and n+ elements, and standard CMOS tungsten metal layers for thermopile cold junction heatsinking, significantly reducing the chip size and simplifying its processing. We demonstrate a 16×16 pixel device with 34 V/W responsivity and enhanced optical absorption in the 8-14 μm waveband, with a suitable performance for gesture recognition and people-counting applications. Our simple, low-cost sensor is an attractive on-chip array for a variety of applications in the mid-infrared spectral region.

Description

Keywords

40 Engineering, 4009 Electronics, Sensors and Digital Hardware

Journal Title

Optics Letters

Conference Name

Journal ISSN

0146-9592
1539-4794

Volume Title

44

Publisher

Optical Society of America

Rights

All rights reserved