Smart CMOS mid-infrared sensor array.
Accepted version
Peer-reviewed
Repository URI
Repository DOI
Change log
Authors
Popa, Daniel https://orcid.org/0000-0002-5708-743X
Ali, Syed Zeeshan
Hopper, Richard https://orcid.org/0000-0003-1863-9008
Dai, Ying
Udrea, Florin https://orcid.org/0000-0002-7288-3370
Abstract
We present a novel single-chip thermopile sensor array for mid-infrared room temperature imaging. The array is fabricated on a single complementary metal-oxide-semiconductor (CMOS) dielectric membrane, composed of single-crystal silicon (Si) p+ and n+ elements, and standard CMOS tungsten metal layers for thermopile cold junction heatsinking, significantly reducing the chip size and simplifying its processing. We demonstrate a 16×16 pixel device with 34 V/W responsivity and enhanced optical absorption in the 8-14 μm waveband, with a suitable performance for gesture recognition and people-counting applications. Our simple, low-cost sensor is an attractive on-chip array for a variety of applications in the mid-infrared spectral region.
Description
Keywords
40 Engineering, 4009 Electronics, Sensors and Digital Hardware
Journal Title
Optics Letters
Conference Name
Journal ISSN
0146-9592
1539-4794
1539-4794
Volume Title
44
Publisher
Optical Society of America
Publisher DOI
Rights
All rights reserved