This is a readme-file for the dataset to the article  "Antiferromagnetism and p-type conductivity of non-stoichiometric nickel oxide thin films".

Authors: M. Napari1, T. N. Huq1, T. Maity1, D. Gomersall2, K. Niang2, A. Barthel1, J. Thompson1, S. Kinnunen3, K. Arstila3, T. Sajavaara3, R. L. Z. Hoye1, A. J. Flewitt2, and J. L. MacManus-Driscoll1

1 Department of Materials Science and Metallurgy, University of Cambridge, Cambridge, United King- dom
2 Electrical Engineering Division, Department of Engineering, University of Cambridge, Cambridge, United Kingdom
3 Department of Physics, University of Jyvaskyla, Jyvaskyla, Finland

DOI: 10.1002/inf2.12076

The dataset contains the files used for the figures and tables in the Article and its Supporting Information.

--
ARTICLE FIGURES:

--

Fig1a:

General information:Powder X-ray diffraction data of a 170nm PEALD nickel oxide film deposited on Si. 

Measured by: Dr Mari Napari, University of Cambridge, July 2018

Methodological information: 
The experimental details are given in the Article's Supporting information.

Data and file overview: The .raw datafile was generated by the Bruker D8 diffractometer, and can be opened by any common X-ray data-analysis software. .txt file contains the same data after background subtraction in ASCII format.

Files: XRD-PEALD-NiO.raw, XRD-PEALD-NiO.txt

--

Fig2a

General information:
Time-of-flight elastic recoil detection analysis elemental depth profile data of 50 nm thick PEALD nickel oxide film. The files are calculated from the timestamped time-of-flight - energy histograms using a home-programmed analysis software 'potku' (https://www.jyu.fi/science/en/physics/research/infrastructures/accelerator-laboratory/pelletron/potku) The original raw data .evnt files are not included due to the large file size (>1GB per file), but can be requested from the corresponding author.

Measured by: Dr Mari Napari, University of Jyvaskyla, Finland, March 2018

Methodological information: The experimental details are given in the Article's Supporting information.

Data and file overview: Each of the ASCII files provided presents the elemental concentration of the element defined as the file end i.e .H, .C, .N. For plotting the elemental depth profile, use first and fourth column.

Subfolder: PEALD-NiO-200-ToF-ERDA, files: depth.C, depth.H, depth.N, depth.Ni, depth.O, depth.Si, 

--

Fig2b

General information:
X-ray photoelectron spectroscopy data of PEALD nickel oxide film.

Measured by: Chris Amey, Mari Napari, University of Cambridge, May 2018

Methodological information: The experimental details are given in the Article's Supporting information.

Data and file overview: The data are raw data recorded by the Avantage software of the Thermo Fisher spectrometer. the .avg files can be opened by the Avantage, or converted e.g. into .vms files in CasaXPS analysis software.

Subfolder: NiO-PEALD-200-XPS, files: C1s Scan.avg, Ni2p Scan.avg, O1s Scan.avg, XPS Survey.avg

--

Fig3a and Fig3b:

General information: 
The magnetic data was taken to show the magnetic properties of 50nm thick NiOx thin film. deposited on silicon wafer

Measured by: Dr Tuhin Maity, University of Cambridge, August 2019

Methodological information: 
Data file content the raw data taken in Quantum Design MPMS3 magnetometer. Measurement procedure is given in the Article and the Supporting Information.

Data and file overview: 
Data files were generated in Quantum Design MPMS3 magnetometer. The raw data can be opened in Origin (Import single ASCII or Ctrl+K) and plotted. For hysteresis loop (MH) plot Magnetic Field (Oe) vs Moment (emu) and for temperature dependent magnetisation (MT: ZFC, FC, REM) plot Temperature (K) vs Moment (emu).

File name: 
File name of the data is as follows
(Materials)_(sample ID)_(Figure number in the manuscript)_(Field range for hysteresis loop (MH)/magnetisation vs temperature(MT) measurement)
Example: NiO_ID8_Fig3a_07T_07T_Negative_MH

--

SUPPORTING INFORMATION

--

FigS2:

General information:Powder X-ray diffraction patterns of solution deposited (spin coated, 50 nm), PEALD (50 nm), and AP-CVD ( 200nm) grown nickel oxide films deposited at different temperatures.

Measured by: Dr Mari Napari, Armin Barthel, University of Cambridge, April 2018 & August 2018 

Methodological information: 
The experimental details are given in the Article's Supporting information.

Data and file overview: The files are ASCII files exported from the measured .raw files after background subtraction.

Files: APCVD-NiO-300-XRD.txt, APCVD-NiO-250-XRD.txt. PEALD-NiO-200-XRD.txt, PEALD-NiO-250-XRD.txt, soldep-NiO-XRD.txt

--

FigS3:

General information: Atomic force micrographs of the APCVD, PEALD, and solution deposited nickel oxide films.

Measured by Dr Mari Napari, University of Cambridge, April 2018, May 2018, July 2018

Methodological information: 
The experimental details are given in the Article's Supporting information.

Data and file overview: Raw data files exported from the Bruker Nanoscope software. The files can be opened in any common software used for AFM image processing (eg nanoscope, gwyddion)

Files: APCVD-NiO-AFM.000, PEALD-NiO-AFM.005, Soldep-NiO-AFM.003

--

FigS5:

General information:
Time-of-flight elastic recoil detection analysis elemental depth profile data of 200 nm thick APCVD nickel oxide films deposited at 250 and 300 degrees C. The files are calculated from the timestamped time-of-flight - energy histograms using a home-programmed analysis software 'potku' (https://www.jyu.fi/science/en/physics/research/infrastructures/accelerator-laboratory/pelletron/potku) The original raw data .evnt files are not included due to the large file size (>1GB per file), but can be requested from the corresponding author.

Measured by: Dr Mari Napari, University of Jyvaskyla, Finland, March 2018

Methodological information: The experimental details are given in the Article's Supporting information.

Data and file overview: Each of the ASCII files provided presents the elemental concentration of the element defined as the file end i.e .H, .C, .N. For plotting the elemental depth profile, use first and fourth column.

Subfolder: APCVD-NiO-250-ToF-ERDA, files: depth.C, depth.H, depth.Ni, depth.O, depth.Si 

Subfolder: APCVD-NiO-300-ToF-ERDA, files: depth.C, depth.H, depth.Ni, depth.O, depth.Si

--

FigS6:

General information:
X-ray photoelectron spectroscopy data of APCVD, PEALD, and solution deposited nickel oxide films.

Measured by: Chris Amey, Mari Napari, University of Cambridge, May 2018, September 2018

Data and file overview: The data are raw data recorded by the Avantage software of the Thermo Fisher spectrometer. the .avg files can be opened by the Avantage, or converted e.g. into .vms files in CasaXPS analysis software.

Subfolder: PEALD-NiO-XPS, files: C1s Scan.avg, Ni2p Scan.avg, O1s Scan.avg, XPS Survey.avg

Subfolder: APCVD-NiO-XPS, files: C1s Scan.avg, Ni2p Scan.avg, O1s Scan.avg, XPS Survey.avg

Subfolder: Soldep-NiO-XPS, files: C1s Scan.avg, Ni2p Scan.avg, O1s Scan.avg, XPS Survey.avg

--

FigS7: 

General information: I-V curves recorded form APCVD and PEALD nickel oxide films at different temperatures.

Measured by: Dr Kham Niang, University of Cambridge, March 2019

Data and file overview: The data .iv files are in ASCII format, the number before the .iv file end i.e. _XXC.iv is the measurement temperature

Subfolder: APCVD-NiO, files: APCVDNiOx_R2C2_WL50_XXC.iv

Subfolder: PEALD-NiO, files: PEALDNiOx_R1C2_WL50_XXC.iv

--

FigS8:

General information: UV-VIS transmittance and reflectance data of PEALD, APCVD, and solution deposited nickel oxide films on borosilicate glass

Measured by; Tahmida Huq, Jerome Innocent

Methodological information: The experimental details are given in the Article's Supporting information.

Data and file overview: The data is in ASCII format, the last letter T/R of the file name indicates transmittance (T) or reflectance (R) data. Reference data for borosilicate glass is also provided.

Files: APCVD-NiO-R.txt, APCVD-NiO-T.txt, Borosilicate-ref-UV-VIS-R.txt, Borosilicate-ref-UV-VIS-T.txt, PEALD-NiO-R.txt, PEALD-NiO-T.txt, Soldep-NiO-UV-VIS-T.txt

--

FigS9:

General information: 
The magnetic data was taken to show the magnetic properties of 50nm thick NiOx thin film. deposited on silicon wafer

Measured by: Dr Tuhin Maity, University of Cambridge, August 2019

Methodological information: 
Data file content the raw data taken in Quantum Design MPMS3 magnetometer. Measurement procedure is given in the Article and the Supporting Information.

Data and file overview: 
Data files were generated in Quantum Design MPMS3 magnetometer. The raw data can be opened in Origin (Import single ASCII or Ctrl+K) and plotted. For hysteresis loop (MH) plot Magnetic Field (Oe) vs Moment (emu) and for temperature dependent magnetisation (MT: ZFC, FC, REM) plot Temperature (K) vs Moment (emu).

File name: 
File name of the data is as follows
(Materials)_(sample ID)_(Figure number in the manuscript)_(Field range for hysteresis loop (MH)/magnetisation vs temperature(MT) measurement)
Example: NiO_ID8_Fig3a_07T_07T_Negative_MH

--

Table S1:

TOF-ERDA data:

General information:
Time-of-flight elastic recoil detection analysis elemental depth profile data of 50 and 170/200 nm thick PEALD and APCVD nickel oxide films deposited at different temperatures. The files are calculated from the timestamped time-of-flight - energy histograms using a home-programmed analysis software 'potku' (https://www.jyu.fi/science/en/physics/research/infrastructures/accelerator-laboratory/pelletron/potku) The original raw data .evnt files are not included due to the large file size (>1GB per file), but can be requested from the corresponding author.

Measured by: Dr Mari Napari, Sami Kinnunen, University of Jyvaskyla, Finland, March 2018, February 2019

Methodological information: The experimental details are given in the Article's Supporting information.

Data and file overview: Each of the ASCII files provided presents the elemental concentration of the element defined as the file end i.e .H, .C, .N. For plotting the elemental depth profile, use first and fourth column.

XPS data:

X-ray photoelectron spectroscopy data of APCVD, PEALD, and solution deposited nickel oxide films.

Measured by: Chris Amey, Mari Napari, University of Cambridge, May 2018, September 2018

Methodological information: The experimental details are given in the Article's Supporting information.

Data and file overview: The data are raw data recorded by the Avantage software of the Thermo Fisher spectrometer. the .avg files can be opened by the Avantage, or converted e.g. into .vms files in CasaXPS analysis software.

Subfolders:
AP-CVD-NiO/XPS, files: C1s Scan_0.avg, N1s Scan_0.avg ,Ni2p Scan_0.avg, O1s Scan_0.avg, XPS Survey_0.avg
AP-CVD-NiO/TOF-ERDA/AP-CVD-NiO-300C-200nm, files: depth.C, depth.H, depth.Ni, depth.O, depth.Si 
AP-CVD-NiO/TOF-ERDA/AP-CVD-NiO-250C-200nm, files: depth.C, depth.H, depth.Ni, depth.O, depth.Si 
AP-CVD-NiO/TOF-ERDA/AP-CVD-NiO-300C-50nm, files: depth.C, depth.H, depth.Ni, depth.O, depth.Si 

Subfolders:
PEALD-NiO/XPS, files: C1s Scan.avg, Ni2p Scan.avg, O1s Scan.avg, XPS Survey.avg
PEALD-NiO/ToF-ERDA/PEALD-NiO-200C-50nm, files: depth.C, depth.H, depth.N, depth.Ni, depth.O, depth.Si 
PEALD-NiO/ToF-ERDA/PEALD-NiO-200C-170nm, files: depth.C, depth.H, depth.N, depth.Ni, depth.O, depth.Si 
PEALD-NiO/ToF-ERDA/PEALD-NiO-250C-170nm, files: depth.C, depth.H, depth.N, depth.Ni, depth.O, depth.Si 
PEALD-NiO/ToF-ERDA/PEALD-NiO-250C-50nm, files: depth.C, depth.H, depth.N, depth.Ni, depth.O, depth.Si 

Subfolder: Soldep-NiO/XPS, files: C1s Scan_0.avg, N1s Scan_0.avg, Ni2p Scan_0.avg, O1s Scan_0.avg, XPS Survey_0.avg

--