mqtMQTAAZMaterials for Quantum TechnologyMQTMater. Quantum Technol.2633-4356IOP Publishingmqtac2ef710.1088/2633-4356/ac2ef7ac2ef7MQT-100048.R2PaperStrain in heterogeneous quantum devices with atomic layer deposition0000-0002-1945-960XKennedyOscar W14*okennedy@oxfordquantumcircuits.comO’SullivanJames1ZollitschChristoph W1ThomasChristopher N2WithingtonStafford2MortonJohn J L13 London Centre for Nanotechnology, UCL, 17-19 Gordon Street, London, WC1H 0AH, United Kingdom Cavendish Laboratory, University of Cambridge, JJ Thomson Ave, Cambridge CB3 0HE, United Kingdom Department of Electrical and Electronic Engineering, UCL, Malet Place, London, WC1E 7JE, United Kingdom

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Present address: Oxford Quantum Circuits, Thames Valley Science Park, Shinfield, Reading, RG2 9LH, UK.

12202141120214112021140450023820218102021121020212492021© 2021 The Author(s). Published by IOP Publishing Ltd2021 Original content from this work may be used under the terms of the Creative Commons Attribution 4.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.Abstract

We investigated the use of dielectric layers produced by atomic layer deposition (ALD) as an approach to strain mitigation in composite silicon/superconductor devices operating at cryogenic temperatures. We show that the addition of an ALD layer acts to reduce the strain of spins closest to silicon/superconductor interface where strain is highest. We show that appropriately biasing our devices at the hyperfine clock transition of bismuth donors in silicon, we can remove strain broadening and that the addition of ALD layers left T 2 (or temporal inhomogeneities) unchanged in these natural silicon devices.

strainESRquantum memoryatomic layer depositionEngineering and Physical Sciences Research Councilhttps://doi.org/10.13039/501100000266 EP/P510270/1Horizon 2020 Framework Programmehttps://doi.org/10.13039/100010661 771493 (LOQO-MOTIONS)ccc2633-4356/21/045002+6$33.00printedPrinted in the UKcrossmarkyes