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Substrate-assisted nucleation of ultra-thin dielectric layers on graphene by atomic layer deposition


Type

Article

Change log

Authors

Dlubak, B 
Kidambi, PR 
Weatherup, RS 
Robertson, J 

Abstract

We report on a large improvement in the wetting of Al2O3 thin films grown by un-seeded atomic layer deposition on monolayer graphene, without creating point defects. This enhanced wetting is achieved by greatly increasing the nucleation density through the use of polar traps induced on the graphene surface by an underlying metallic substrate. The resulting Al2O3/graphene stack is then transferred to SiO2 by standard methods.

Description

Keywords

cond-mat.mtrl-sci, cond-mat.mtrl-sci

Journal Title

Applied Physics Letters

Conference Name

Journal ISSN

0003-6951
1077-3118

Volume Title

100

Publisher

AIP Publishing
Sponsorship
Engineering and Physical Sciences Research Council (EP/H047565/1)
European Research Council (279342)
P.R.K. acknowledges funding from Cambridge Commonwealth Trust. R.S.W. acknowledges funding from EPSRC (Doctoral training award). S.H. acknowledges funding from ERC Grant InsituNANO (No. 279342) and EPSRC (Grant No. EP/ H047565/1).