These are supporting research data files for "Growth of non-polar InGaN quantum dots with an underlying AlN/GaN distributed Bragg reflector by metal-organic vapour phase epitaxy" article, published in "Superlattices and Microstructures": 10.1016/j.spmi.2015.10.001 Detailed description of these data is contained within figure captions in paper (article's DOI will be available after publication).