Effects of spatial sensitivity on mass sensing with bulk acoustic mode resonators
Sensors and Actuators, A: Physical
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Zielinski, A., Prasad, A., Seshia, A., Kalberer, M., & Jones, R. (2015). Effects of spatial sensitivity on mass sensing with bulk acoustic mode resonators. Sensors and Actuators, A: Physical, 236 369-379. https://doi.org/10.1016/j.sna.2015.11.003
The spatial sensitivity of bulk acoustic mode resonators can influence calibrations when they are implemented as accurate mass sensors of surface-bound particles. A new spatial sensitivity model based on images of the resonator surface is introduced from early principles. The adsorption of particles was studied empirically by repeatedly drying particle laden droplets on the surface of two 3.14 MHz bulk acoustic mode resonators. Theoretical and experimental results were compared to identify three scenarios over the course of consecutive droplet evaporation with varying spatial sensitivity influences. Examining different surface treatments for the resonators revealed the hydrophilic surface to have a higher rate of particle stacking and conglomeration.
spatial sensitivity, Bulk Acoustic Wave (BAW), bulk acoustic mode resonator, particulate mass sensor, MEMS, mathematical modelling
ATZ thanks the Natural Sciences and Engineering Research Council of Canada, the Sir Winston Churchill Society of Edmonton, and the Cambridge Trust for funding of the PhD degree.
Natural Environment Research Council (NE/I007490/1)
External DOI: https://doi.org/10.1016/j.sna.2015.11.003
This record's URL: https://www.repository.cam.ac.uk/handle/1810/252522
Attribution-NonCommercial-NoDerivs 2.0 UK: England & Wales
Licence URL: http://creativecommons.org/licenses/by-nc-nd/2.0/uk/