Carbon nanotube forests as top electrode in electroacoustic resonators
Applied Physics Letters
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Esconjauregui, S., Makaryan, T., Mirea, T., DeMiguel-Ramos, M., Olivares, J., Guo, Y., Sugime, H., et al. (2015). Carbon nanotube forests as top electrode in electroacoustic resonators. Applied Physics Letters, 107 (133106)https://doi.org/10.1063/1.4932197
We grow carbon nanotube forests on piezoelectric AlN films and fabricate and characterize nanotube-based solidly-mounted bulk acoustic wave resonators employing the forests as the top electrode material. The devices show values for quality factor at anti-resonance of ~430, and at resonance of ~100. The effective coupling coefficient is of ~6%, and the resonant frequencies are up to ~800 MHz above those observed with metallic top electrodes. AlN promotes a strong catalyst-support interaction, which reduces Fe catalyst mobility, and thus enforces the growth of forests by the base growth mechanism.
This work was partially supported by the European Commission through the project GRAFOL and the COST action IC1208 and by the Ministerio de Economía y Competitividad del Gobierno de España through project MAT2013-45957.
External DOI: https://doi.org/10.1063/1.4932197
This record's URL: https://www.repository.cam.ac.uk/handle/1810/253659
Attribution-NonCommercial 2.0 UK: England & Wales
Licence URL: http://creativecommons.org/licenses/by-nc/2.0/uk/
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