Bulk Molybdenum Spindt Field Emission Arrays
Cole, Matthew T.
Milne, William I.
One Central Press
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Zhu, N., Xu, K., Zhai, Y., Di, Y., Zhang, Z., Chen, J., Cole, M. T., et al. (2016). Bulk Molybdenum Spindt Field Emission Arrays. Functional Nanostructures, 2 (1), 22-25. https://doi.org/10.17863/CAM.100
This is the final version of the article. It first appeared from One Central Press via http://www.onecentralpress.com/bulk-molybdenum-spindt-field-emission-arrays/.
This paper reports on a simple approach for fabricating modest aspect ratio field emission arrays (FEAs) directly from bulk molybdenum substrates via the use of fluorine inductive-coupled-plasma (ICP) etching. Compared to traditional Spindt array fabrication, through our outlined fabrication process all thin film interfaces have been eliminated reducing tip delamination during operation. The as-fabricated devices exhibited low turn-on electric fields (I = 100nA) of 1.21 V/μm. Arrays of more than 10$^6$ tips, with controlled inter-tip-pitches of 10 μm, have produced maximum currents of up to 140 μA (5.48 V/μm). Spatially uniform emission, that can be white light optically modulated, has been observed making our Mo-FEAs promising for use in long-term, high beam current continuous emission applications.
This record's DOI: https://doi.org/10.17863/CAM.100
This record's URL: https://www.repository.cam.ac.uk/handle/1810/256159
Attribution 4.0 International
Licence URL: http://creativecommons.org/licenses/by/4.0/
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