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Bulk Molybdenum Spindt Field Emission Arrays

Published version
Peer-reviewed

Type

Article

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Authors

Zhu, Ningli 
Xu, Kaisi 
Zhai, Yusheng 
Di, Yunsong 
Zhang, Zhipeng 

Abstract

This paper reports on a simple approach for fabricating modest aspect ratio field emission arrays (FEAs) directly from bulk molybdenum substrates via the use of fluorine inductive-coupled-plasma (ICP) etching. Compared to traditional Spindt array fabrication, through our outlined fabrication process all thin film interfaces have been eliminated reducing tip delamination during operation. The as-fabricated devices exhibited low turn-on electric fields (I = 100nA) of 1.21 V/μm. Arrays of more than 106 tips, with controlled inter-tip-pitches of 10 μm, have produced maximum currents of up to 140 μA (5.48 V/μm). Spatially uniform emission, that can be white light optically modulated, has been observed making our Mo-FEAs promising for use in long-term, high beam current continuous emission applications.

Description

This is the final version of the article. It first appeared from One Central Press via http://www.onecentralpress.com/bulk-molybdenum-spindt-field-emission-arrays/.

Keywords

Journal Title

Functional Nanostructures

Conference Name

Journal ISSN

Volume Title

2

Publisher

One Central Press

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Sponsorship
Oppenheimer Trust