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Electronic properties of CVD graphene: The role of grain boundaries, atmospheric doping, and encapsulation by ALD

Published version
Peer-reviewed

Type

Article

Change log

Authors

Van Veldhoven, ZA 
Alexander-Webber, JA 
Sagade, AA 
Braeuninger-Weimer, Philipp  ORCID logo  https://orcid.org/0000-0001-8677-1647

Abstract

jats:sec<jats:label />jats:pGrain boundaries and unintentional doping can have profound effects on graphene‐based devices. Here we study these in detail for CVD grown poly‐crystalline monolayer graphene with two significantly different grain size distributions centered around 10–25 μm and 100–400 μm. Although the two types of graphene are processed under identical conditions after growth, they show distinct transport properties in field effect transistor devices. While all as‐fabricated samples showed similar jats:italicp</jats:italic>‐type doping, the smaller grain size type graphene with larger number of grain boundaries exhibit lower average mobility. In order to separate out the effects of grain boundaries and doping from ambient exposure on the transport properties, the devices were encapsulated with Aljats:sub2</jats:sub>Ojats:sub3</jats:sub> by atomic layer deposition. The encapsulation of large grain samples thereby showed drastic improvements in the performance with negligible doping while the small grain samples are largely intolerant to this process. We discuss the implications of our data for the integrated manufacturing of graphene‐based device platforms.</jats:p></jats:sec>

Description

Keywords

ALD, CVD, field effect transistors, grain boundaries, graphene, mobility

Journal Title

Physica Status Solidi (B) Basic Research

Conference Name

Journal ISSN

0370-1972
1521-3951

Volume Title

Publisher

Wiley
Sponsorship
Engineering and Physical Sciences Research Council (EP/K016636/1)
Engineering and Physical Sciences Research Council (EP/L016087/1)
We acknowledge funding from EPSRC (grant EP/K016636/1, GRAPHTED). Z.A.V.V. acknowledges funding from ESPRC grant EP/L016087/1. J.A.A.-W. acknowledges a Research Fellowship from Churchill College, Cambridge.