Microfluidic devices fabricated using fast wafer-scale LED-lithography patterning
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Journal Title
Biomicrofluidics
ISSN
1932-1058
Publisher
AIP
Volume
11
Issue
1
Number
014113
Language
English
Type
Article
This Version
AM
Metadata
Show full item recordCitation
Challa, P., Kartanas, T., Charmet, J., & Knowles, T. (2017). Microfluidic devices fabricated using fast wafer-scale LED-lithography patterning. Biomicrofluidics, 11 (1. 014113)https://doi.org/10.1063/1.4976690
Abstract
Current lithography approaches underpinning the fabrication of microfluidic devices rely on UV exposure of photoresists to define microstructures in these materials. Conventionally, this objective is achieved with gas discharge mercury lamps, which are capable of producing high intensity UV radiation. However, these sources are costly, have a comparatively short lifetime, necessitate regular calibration, and require significant time to warm up prior to exposure taking place. To address these limitations we exploit advances in solid state sources in the UV range and describe a fast and robust wafer-scale laboratory exposure system relying entirely on UV-Light emitting diode (UV-LED) illumination. As an illustration of the potential of this system for fast and low-cost microfluidic device production, we demonstrate the microfabrication of a 3D spray-drying microfluidic device and a 3D double junction microdroplet maker device.
Sponsorship
This work was supported by the ERC, the BBSRC, the EPSRC, the Welcome Trust and the Newman Foundation.
Funder references
European Research Council (337969)
Identifiers
External DOI: https://doi.org/10.1063/1.4976690
This record's URL: https://www.repository.cam.ac.uk/handle/1810/263180
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