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dc.contributor.authorDing, Ten
dc.contributor.authorChikkaraddy, Rohiten
dc.contributor.authorMertens, Jen
dc.contributor.authorBaumberg, Jeremyen
dc.date.accessioned2017-05-31T11:02:27Z
dc.date.available2017-05-31T11:02:27Z
dc.identifier.urihttps://www.repository.cam.ac.uk/handle/1810/264521
dc.descriptionsee the figure captions in the paperen
dc.formatorigin, notepaden
dc.rightsAttribution 4.0 Internationalen
dc.rightsAttribution 4.0 Internationalen
dc.rightsAttribution 4.0 Internationalen
dc.rightsAttribution 4.0 Internationalen
dc.rightsAttribution 4.0 Internationalen
dc.rightsAttribution 4.0 Internationalen
dc.rightsAttribution 4.0 Internationalen
dc.rightsAttribution 4.0 Internationalen
dc.rightsAttribution 4.0 Internationalen
dc.rightsAttribution 4.0 Internationalen
dc.rightsAttribution 4.0 Internationalen
dc.rightsAttribution 4.0 Internationalen
dc.rightsAttribution 4.0 Internationalen
dc.rightsAttribution 4.0 Internationalen
dc.rightsAttribution 4.0 Internationalen
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.subjectphotolithographyen
dc.subjectdiffraction limiten
dc.subjectpolystyreneen
dc.subjectphoto-degradationen
dc.subjectcrevicesen
dc.titleResearch data supporting "Near-Field Optical Drilling of Sub-λ Pits in Thin Polymer Films"en
dc.typeDataset
dc.identifier.doi10.17863/CAM.9981
rioxxterms.licenseref.urihttp://creativecommons.org/licenses/by/4.0/http://creativecommons.org/licenses/by/4.0/en
datacite.contributor.supervisorBaumberg, Jeremy J
dcterms.format.rar, .txten
dc.contributor.orcidChikkaraddy, Rohit [0000-0002-3840-4188]
dc.contributor.orcidBaumberg, Jeremy [0000-0002-9606-9488]
rioxxterms.typeOtheren
pubs.funder-project-idEuropean Research Council (320503)
pubs.funder-project-idEPSRC (EP/L027151/1)
pubs.funder-project-idLeverhulme Trust (ECF-2016-606)
datacite.issupplementto.doi10.1021/acsphotonics.6b01000en


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