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dc.contributor.authorRughoobur, Gen
dc.contributor.authorDeMiguel-Ramos, Men
dc.contributor.authorEscolano, J-Men
dc.contributor.authorIborra, Een
dc.contributor.authorFlewitt, Andrewen
dc.date.accessioned2017-06-01T13:00:14Z
dc.date.available2017-06-01T13:00:14Z
dc.date.issued2017-05-02en
dc.identifier.issn2045-2322
dc.identifier.urihttps://www.repository.cam.ac.uk/handle/1810/264573
dc.description.abstractShear mode solidly mounted resonators (SMRs) are fabricated using an inclined c-axis ZnO grown on a rough Al electrode. The roughness of the Al surface is controlled by changing the substrate temperature during the deposition process to promote the growth of inclined ZnO microcrystals. The optimum substrate temperature to obtain homogeneously inclined c-axis grains in ZnO films is achieved by depositing Al at 100 °C with a surface roughness ~9.2 nm, which caused an inclination angle of ~25° of the ZnO c-axis with respect to the surface normal. Shear mode devices with quality-factors at resonance, Q r and effective electromechanical coupling factors, [Formula: see text], as high as 180 and 3.4% are respectively measured. Mass sensitivities, S m of (4.9 ± 0.1) kHz · cm(2)/ng and temperature coefficient of frequency (TCF) of ~-67 ppm/K are obtained using this shear mode. The performance of the devices as viscosity sensors and biosensors is demonstrated by determining the frequency shifts of water-ethanol mixtures and detection of Rabbit immunoglobin G (IgG) whole molecule (H&L) respectively.
dc.description.sponsorshipThe research leading to these results has received funding from the European Community’s Horizon 2020 Programme under Grant Agreement No. SPIRE-01-2014-636820, the IC1208 Cost action, and from the Ministerio de Economía y Competitividad del Gobierno de España through the project MAT2013-45957-R. Financial support from these institutions is therefore gratefully acknowledged. G.R. also wishes to acknowledge funding from the Cambridge Commonwealth, European and International Trust.
dc.languageengen
dc.language.isoenen
dc.publisherNature Publishing Group
dc.rightsAttribution 4.0 Internationalen
dc.rightsAttribution 4.0 Internationalen
dc.rightsAttribution 4.0 Internationalen
dc.rightsAttribution 4.0 Internationalen
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en
dc.titleGravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured Al electrodesen
dc.typeArticle
prism.issueIdentifier1en
prism.number1367en
prism.publicationDate2017en
prism.publicationNameScientific Reportsen
prism.volume7en
dc.identifier.doi10.17863/CAM.10030
dcterms.dateAccepted2017-03-30en
rioxxterms.versionofrecord10.1038/s41598-017-01545-2en
rioxxterms.versionVoRen
rioxxterms.licenseref.urihttp://creativecommons.org/licenses/by/4.0/en
rioxxterms.licenseref.startdate2017-05-02en
dc.contributor.orcidFlewitt, Andrew [0000-0003-4204-4960]
dc.identifier.eissn2045-2322
rioxxterms.typeJournal Article/Reviewen
cam.orpheus.successThu Jan 30 12:53:40 GMT 2020 - The item has an open VoR version.*
rioxxterms.freetoread.startdate2100-01-01


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Attribution 4.0 International
Except where otherwise noted, this item's licence is described as Attribution 4.0 International