Repository logo
 

Carbon thin films with enhanced properties from cathodic arc plasmas.


No Thumbnail Available

Type

Thesis

Change log

Authors

Chhowalla, Manish 

Abstract

In this thesis, the physical, optical and electronic properties of amorphous carbon ( a-C) thin films deposited using a filtered and unfiltered cathodic arcs are investigated. Firstly, the plasma properties of the filtered cathodic vacuum arc (FCVA) have been examined using planar and wire Langmuir probes in order to optimize the plasma throughput around the 90� bend. The knowledge of plasma characteristics is then utilized to understand the properties of highly tetrahedral amorphous carbon ( ta-C) films as a function of the ion energy, deposition temperature and the deposition rate. A model based on the intrinsic thermal effects of the deposition process is developed to explain the discrepancy of the sp3 fraction versus the ion energy in the literature. The possibility of p-type electronic doping of ta-C has also been investigated by the incorporation of B into the ta-C matrix. It was shown for the first time that the incorporation of B in ta-C reduces the compressive stress while maintaining high sp3 bonding. The details of a new form of arc discharge referred to as the 'stationary arc' which allows the deposition of smooth ta-C films without a bulky macroparticle filter are reported. Finally, extraordinary hardness and elastic properties of a new form of carbon arising from interlinking of graphitic nanoparticles are also presented.

Description

This thesis is not available on this repository until the author agrees to make it public. If you are the author of this thesis and would like to make your work openly available, please contact us: thesis@repository.cam.ac.uk.


Cambridge University Library can make a copy of this work available only for the purposes of private study and non-commercial research. Copies should not be shared or saved in any shared facilities. Copyright over the content of these works is with their authors. Theses from the Library collection are considered unpublished works and according to UK legislation quoting from them is not allowed without permission from their author.

If you can commit to these terms, please complete the request form which you can find through this link: https://imagingservices.lib.cam.ac.uk/


Please note that print copies of theses may be available for consultation in the Cambridge University Library's Manuscript reading room. Admission details are at http://www.lib.cam.ac.uk/collections/departments/manuscripts-university-archives

Date

Advisors

Keywords

Qualification

Doctor of Philosophy (PhD)

Awarding Institution

University of Cambridge