Research data supporting "Modelling focused electron beam induced deposition beyond Langmuir adsorption"
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Sanz-Hernandez, D., & Fernandez-Pacheco, A. Research data supporting "Modelling focused electron beam induced deposition beyond Langmuir adsorption" [Dataset]. https://doi.org/10.17863/CAM.11214
Data files supporting publication "Modelling focused electron beam induced deposition beyond Langmuir adsorption". The files included are: (1) multilayer_FEBID_solution_maps.nb (2) FEBID_Frequency_tool.xlsx File (1) Is a Wolphram Mathematica notebook, which is used to analytically solve the Multilayer FEBID model and generate normalized frequency maps where different regimes can be identified. This file was developed and tested using Version 18.104.22.168 of Wolphram Mathematica. File (2) is a Microsoft Excel Spreadsheet which can be used to calculate characteristic FEBID frequencies as a function of experimental parameters. This file was developed using the Package Microsoft Office 2016.
Two programs are necessary in order to use the files: (1) Wolphram Mathematica in order to solve the differential equations included in the article (2) Microsoft Excel in order to use the FEBID frequency calculator presented in the article.
3d nano-printing, modelling, focused electron beam induced processing, BET model, Langmuir model
Publication Reference: https://doi.org/10.3762/bjnano.8.214
This record's DOI: https://doi.org/10.17863/CAM.11214
Attribution 4.0 International
Licence URL: http://creativecommons.org/licenses/by/4.0/