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Scandium Aluminium Nitride-Based Film Bulk Acoustic Resonators

Published version
Peer-reviewed

Type

Conference Object

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Authors

Flewitt, AJ 
De Miguel ramos, M 
Iborra, E 
Schmid, U 
Schneider, M 

Abstract

Film bulk acoustic resonators (FBAR) are promising candidates to replace surface acoustic wave devices as filters or delay lines, but also offer exciting opportunities as biological or gas sensors. In this work, solidly mounted FBARs were manufactured by substituting commonly used pure aluminium nitride (AlN) by scandium doped aluminium nitride (ScAlN) thin films as the piezoelectric layer. The ScAlN-based resonators feature a significant improvement of the electromechanical coupling factor from ~3% to ~12% compared to the pure AlN, while the decreased stiffness of ScAlN results in a decrease of the quality factor from ~300 to ~100 due to increased damping losses in the piezoelectric material.

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Keywords

Journal Title

Conference Name

Eurosensors 2017

Journal ISSN

Volume Title

Publisher

Mdpi
Sponsorship
European Commission Horizon 2020 (H2020) Industrial Leadership (IL) (636820)