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dc.contributor.authorFlewitt, Andrewen
dc.contributor.authorDe Miguel ramos, Men
dc.contributor.authorIborra, Een
dc.contributor.authorSchmid, Uen
dc.contributor.authorSchneider, Men
dc.date.accessioned2017-12-11T13:41:15Z
dc.date.available2017-12-11T13:41:15Z
dc.identifier.urihttps://www.repository.cam.ac.uk/handle/1810/270132
dc.description.abstractFilm bulk acoustic resonators (FBAR) are promising candidates to replace surface acoustic wave devices as filters or delay lines, but also offer exciting opportunities as biological or gas sensors. In this work, solidly mounted FBARs were manufactured by substituting commonly used pure aluminium nitride (AlN) by scandium doped aluminium nitride (ScAlN) thin films as the piezoelectric layer. The ScAlN-based resonators feature a significant improvement of the electromechanical coupling factor from ~3% to ~12% compared to the pure AlN, while the decreased stiffness of ScAlN results in a decrease of the quality factor from ~300 to ~100 due to increased damping losses in the piezoelectric material.
dc.publisherMdpi
dc.rightsAttribution 4.0 International*
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/*
dc.titleScandium Aluminium Nitride-Based Film Bulk Acoustic Resonatorsen
dc.typeConference Object
dc.identifier.doi10.17863/CAM.16956
dcterms.dateAccepted2017-08-06en
rioxxterms.versionVoR*
rioxxterms.licenseref.urihttp://www.rioxx.net/licenses/all-rights-reserveden
rioxxterms.licenseref.startdate2017-08-06en
dc.contributor.orcidFlewitt, Andrew [0000-0003-4204-4960]
rioxxterms.typeConference Paper/Proceeding/Abstracten
pubs.funder-project-idEuropean Commission Horizon 2020 (H2020) Industrial Leadership (IL) (636820)
pubs.conference-nameEurosensors 2017en


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Attribution 4.0 International
Except where otherwise noted, this item's licence is described as Attribution 4.0 International