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Experimental and theoretical study of a piezoelectric vibration energy harvester under high temperature

Accepted version
Peer-reviewed

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Type

Article

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Authors

Arroyo, E 
Jia, Y 
Chen, ST 
Seshia, AA 

Description

Keywords

Energy harvesting, high temperature, MEMS, cantilever, AlN

Journal Title

Journal of Microelectromechanical Systems

Conference Name

Journal ISSN

1057-7157
1941-0158

Volume Title

26

Publisher

Institute of Electrical and Electronics Engineers (IEEE)
Sponsorship
Technology Strategy Board (102152)
Engineering and Physical Sciences Research Council (EP/K000314/1)
Engineering and Physical Sciences Research Council (EP/L010917/1)