Research data supporting "α-Ga2O3 grown by low temperature atomic layer deposition on sapphire"
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Authors
Roberts, J
Chalker, P
Oliver, Rachel
Publication Date
2018-02-13Type
Dataset
Metadata
Show full item recordCitation
Roberts, J., Jarman, J., Johnstone, D., Midgley, P., Chalker, P., Oliver, R., & Massabuau, F. (2018). Research data supporting "α-Ga2O3 grown by low temperature atomic layer deposition on sapphire" [Dataset]. https://doi.org/10.17863/CAM.18837
Description
Figure 1. (a) 2θ-ω scan recorded around the α-Al2O3 0006 reflection. Rocking curve ω scans recorded on the (b) α-Ga2O3 0006 and (c) α-Ga2O3 10-14 reflections. RSMs around the (d) α-Al2O3 0006 and (e) α-Al2O3 10-110 reflections. Figure 2. (a) ADF-STEM and (b) HR-TEM image of the sample observed along the α-Al2O3 〈11-20〉 zone-axis. In inset, ABSF-filtered (average background subtraction filter) image of the interface region indicated with a square in (b). Figure 3. SED of the Ga2O3 film observed near the α-Al2O3 〈11-20〉 zone-axis. (a) Composite diffraction contrast image formed plotting the intensity of selected reflections as a function of probe position. Green corresponds to reflections in the α-Ga2O3 〈11-20〉 zone-axis pattern and red corresponds to additional reflections identified in the data. Inset shows the intensity of the direct beam revealing the full extent of the film including non-diffracting components. Representative diffraction patterns (b) from the α-Ga2O3 columns, (c-d) from the tips which are most likely ε-Ga2O3.
Format
image viewer, Epitaxy
Keywords
Gallium oxide, Semiconductor, Atomic layer deposition, X-ray diffraction, Scanning electron diffraction
Relationships
Sponsorship
European Research Council (279361)
Identifiers
This record's DOI: https://doi.org/10.17863/CAM.18837
Rights
Attribution 4.0 International, Attribution 4.0 International, Attribution 4.0 International, Attribution 4.0 International, Attribution 4.0 International, Attribution 4.0 International, Attribution 4.0 International, Attribution 4.0 International, Attribution 4.0 International, Attribution 4.0 International, Attribution 4.0 International
Licence URL: http://creativecommons.org/licenses/by/4.0/http://creativecommons.org/licenses/by/4.0/http://creativecommons.org/licenses/by/4.0/http://creativecommons.org/licenses/by/4.0/http://creativecommons.org/licenses/by/4.0/http://creativecommons.org/licenses/by/4.0/http://creativecommons.org/licenses/by/4.0/http://creativecommons.org/licenses/by/4.0/http://creativecommons.org/licenses/by/4.0/http://creativecommons.org/licenses/by/4.0/http://creativecommons.org/licenses/by/4.0/