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Pulse energy packing effects on material transport during laser processing of < 1

Published version
Peer-reviewed

Type

Article

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Authors

Teh, PS 
Lin, D 
Alam, S 
Richardson, DJ 

Abstract

The effects of energy pulse packing on material transport during single-pulse laser processing of < 1 | 1 | 1 > silicon is studied using temporarily shaped pulses with durations from 50 to 150 ns. Six regimes of material transport were identified and disambiguated through energy packing considerations over a range of pulse durations. Energy packing has been shown to shift the interaction to energetically costlier regimes without appreciable benefit in either depth, material removal or crater morphology and quality.

Description

Keywords

40 Engineering, 5110 Synchrotrons and Accelerators, 51 Physical Sciences, 7 Affordable and Clean Energy

Journal Title

Applied Physics A: Materials Science and Processing

Conference Name

Journal ISSN

0947-8396
1432-0630

Volume Title

124

Publisher

Springer Science and Business Media LLC
Sponsorship
EPSRC (via University of Southampton) (165826)
Engineering and Physical Sciences Research Council (EP/K030884/1)
The authors would like to thank the UK Technology Strategy Board under project TP14/HVM/6/I/BD5665. The authors acknowledge the EPSRC Centre for Doctoral Training in Photonic Systems Development for their generous support.