Research data supporting "Effect of growth temperature and V/III-ratio on the surface morphology of MOVPE-grown cubic zincblende GaN"
Citation
Lee, L. Y., Frentrup, M., Kappers, M., Oliver, R., Humphreys, C., & Wallis, D. (2018). Research data supporting "Effect of growth temperature and V/III-ratio on the surface morphology of MOVPE-grown cubic zincblende GaN" [Dataset]. https://doi.org/10.17863/CAM.25946
Description
Figure 1: XRD intensity profile through the 1-103wz and 113zb reflections for the samples grown on a 4° miscut substrate at 875°C and a V/III-ratio of 76 (a), and 1200 (b). Figure 4: Feature sizes in (a) [110] and (b) [1-10] directions extracted from 2D-FFT of AFM height data of zb-GaN epilayers grown at different growth temperatures and a constant V/III-ratio of 76. (c) Variation of the aspect ratio of surface features with growth temperature. (d) Variation of root mean square surface roughness with growth temperature. Figure 5: Zb-GaN content determined by XRD as a function of the GaN epilayer growth temperature. Figure 8: Feature sizes in (a) [110] and (b) [1-10] directions extracted from 2D-FFT of AFM height data of the zb-GaN epilayers grown at different V/III-ratios and a constant growth temperature of 875 °C. (c) Variation of aspect ratio of surface features with V/III ratio. For (a) to (c), there are no data points for the sample grown at a V/III-ratio of 15, as it was not possible to extract feature sizes using the same 2D-FFT method as for other sample in the series. (d) Variation of root mean square surface roughness with V/III-ratio. The labels i, ii and iii indicate the proposed growth regimes. Figure 11: Relative intensities of the zb-GaN XRD peaks for samples in the V/III-ratio series at a constant growth temperature of 875 °C.
Format
Notepad, Text editor, Notepad++
Keywords
cubic zincblende GaN, MOVPE, morphology, surface roughness, growth model
Relationships
Publication Reference: https://doi.org/10.1063/1.5046801https://www.repository.cam.ac.uk/handle/1810/285120
Sponsorship
EPSRC (EP/R01146X/1)
Technology Strategy Board (TS/N003756/1 - 132135)
EPSRC (EP/M010589/1)
EPSRC (EP/N01202X/1)
EPSRC (EP/P03036X/1)
Identifiers
This record's DOI: https://doi.org/10.17863/CAM.25946
Rights
Attribution 4.0 International, Attribution 4.0 International, Attribution 4.0 International, Attribution 4.0 International, Attribution 4.0 International, Attribution 4.0 International, Attribution 4.0 International, Attribution 4.0 International
Licence URL: http://creativecommons.org/licenses/by/4.0/http://creativecommons.org/licenses/by/4.0/http://creativecommons.org/licenses/by/4.0/http://creativecommons.org/licenses/by/4.0/http://creativecommons.org/licenses/by/4.0/http://creativecommons.org/licenses/by/4.0/http://creativecommons.org/licenses/by/4.0/http://creativecommons.org/licenses/by/4.0/