A mode-localized MEMS accelerometer with 7μg bias stability
View / Open Files
Authors
Pandit, M
Zhao, C
Sobreviela, G
Mustafazade, A
Zou, X
Seshia, AA
Publication Date
2018-04-26Journal Title
2018 IEEE Micro Electro Mechanical Systems (MEMS)
Conference Name
31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
ISSN
1084-6999
ISBN
9781538647820
Publisher
IEEE
Pages
968-971
Type
Conference Object
Metadata
Show full item recordCitation
Pandit, M., Zhao, C., Sobreviela, G., Mustafazade, A., Zou, X., & Seshia, A. (2018). A mode-localized MEMS accelerometer with 7μg bias stability. 2018 IEEE Micro Electro Mechanical Systems (MEMS), 968-971. https://doi.org/10.1109/MEMSYS.2018.8346719
Abstract
This paper reports on the experimental characterization of the resolution, sensitivity and common mode rejection metrics for a mode-localized MEMS accelerometer. A bias stability of 7μg is achieved for closed-loop amplitude ratio measurements at an integration time of 30s representing a significant advancement in the development of high-stability accelerometers employing this transduction principle.
Keywords
Bioengineering
Sponsorship
This work is supported by funding from Innovate UK and Natural Environment Research Council.
Funder references
Natural Environment Research Council (NE/N012097/1)
Identifiers
External DOI: https://doi.org/10.1109/MEMSYS.2018.8346719
This record's URL: https://www.repository.cam.ac.uk/handle/1810/282799
Rights
Licence:
http://www.rioxx.net/licenses/all-rights-reserved
Statistics
Total file downloads (since January 2020). For more information on metrics see the
IRUS guide.
Recommended or similar items
The current recommendation prototype on the Apollo Repository will be turned off on 03 February 2023. Although the pilot has been fruitful for both parties, the service provider IKVA is focusing on horizon scanning products and so the recommender service can no longer be supported. We recognise the importance of recommender services in supporting research discovery and are evaluating offerings from other service providers. If you would like to offer feedback on this decision please contact us on: support@repository.cam.ac.uk