A mode-localized MEMS accelerometer with 7μg bias stability
2018 IEEE Micro Electro Mechanical Systems (MEMS)
31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
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Pandit, M. N., Zhao, C., Sobreviela, G., Mustafazade, A., Zou, X., & Seshia, A. (2018). A mode-localized MEMS accelerometer with 7μg bias stability. 2018 IEEE Micro Electro Mechanical Systems (MEMS), 968-971. https://doi.org/10.1109/MEMSYS.2018.8346719
This paper reports on the experimental characterization of the resolution, sensitivity and common mode rejection metrics for a mode-localized MEMS accelerometer. A bias stability of 7μg is achieved for closed-loop amplitude ratio measurements at an integration time of 30s representing a significant advancement in the development of high-stability accelerometers employing this transduction principle.
This work is supported by funding from Innovate UK and Natural Environment Research Council.
Natural Environment Research Council (NE/N012097/1)
External DOI: https://doi.org/10.1109/MEMSYS.2018.8346719
This record's URL: https://www.repository.cam.ac.uk/handle/1810/282799