A mode-localized MEMS accelerometer with 7μg bias stability
Accepted version
Peer-reviewed
Repository URI
Repository DOI
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Authors
Sobreviela, G
Mustafazade, A
Zou, X
Abstract
This paper reports on the experimental characterization of the resolution, sensitivity and common mode rejection metrics for a mode-localized MEMS accelerometer. A bias stability of 7μg is achieved for closed-loop amplitude ratio measurements at an integration time of 30s representing a significant advancement in the development of high-stability accelerometers employing this transduction principle.
Description
Keywords
4007 Control Engineering, Mechatronics and Robotics, 40 Engineering, Bioengineering
Journal Title
2018 IEEE Micro Electro Mechanical Systems (MEMS)
Conference Name
31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Journal ISSN
1084-6999
Volume Title
Publisher
IEEE
Publisher DOI
Sponsorship
Natural Environment Research Council (NE/N012097/1)
This work is supported by funding from Innovate UK and Natural Environment Research Council.