A mode-localized MEMS accelerometer with 7μg bias stability

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dc.contributor.authorPandit, Milind Narasimha
dc.contributor.authorZhao, Chun
dc.contributor.authorSobreviela, G
dc.contributor.authorMustafazade, A
dc.contributor.authorZou, X
dc.contributor.authorSeshia, Ashwin
dc.date.accessioned2018-09-27T14:10:16Z
dc.date.available2018-09-27T14:10:16Z
dc.date.issued2018-04-26
dc.identifier.isbn9781538647820
dc.identifier.issn1084-6999
dc.identifier.urihttps://www.repository.cam.ac.uk/handle/1810/282799
dc.description.abstractThis paper reports on the experimental characterization of the resolution, sensitivity and common mode rejection metrics for a mode-localized MEMS accelerometer. A bias stability of 7μg is achieved for closed-loop amplitude ratio measurements at an integration time of 30s representing a significant advancement in the development of high-stability accelerometers employing this transduction principle.
dc.description.sponsorshipThis work is supported by funding from Innovate UK and Natural Environment Research Council.
dc.publisherIEEE
dc.titleA mode-localized MEMS accelerometer with 7μg bias stability
dc.typeConference Object
prism.endingPage971
prism.publicationDate2018
prism.publicationName2018 IEEE Micro Electro Mechanical Systems (MEMS)
prism.startingPage968
dc.identifier.doi10.17863/CAM.30163
rioxxterms.versionofrecord10.1109/MEMSYS.2018.8346719
rioxxterms.licenseref.urihttp://www.rioxx.net/licenses/all-rights-reserved
rioxxterms.licenseref.startdate2018-04-26
dc.contributor.orcidPandit, Milind Narasimha [0000-0002-7862-7984]
dc.contributor.orcidZhao, Chun [0000-0001-8400-433X]
dc.contributor.orcidSeshia, Ashwin [0000-0001-9305-6879]
rioxxterms.typeConference Paper/Proceeding/Abstract
pubs.funder-project-idNatural Environment Research Council (NE/N012097/1)
pubs.conference-name31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
pubs.conference-start-date2018-01-21
pubs.conference-finish-date2018-01-25


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