Split resonances for simultaneous detection and control measurements in a single bulk acoustic wave (BAW) sensor.
Published version
Peer-reviewed
Repository URI
Repository DOI
Change log
Authors
Wajs, Ewelina https://orcid.org/0000-0002-6007-9692
Rughoobur, Girish https://orcid.org/0000-0002-1693-4532
Flewitt, Andrew J https://orcid.org/0000-0003-4204-4960
Abstract
A self-referenced resonator consisting of two distinct areas of the top electrode made from Mo and a thin (5-30 nm) functional Au layer is shown. The fundamental frequencies for both the shear (∼1 GHz) and longitudinal (∼2 GHz) modes are split in two, such that mass attachment on the functional layer region causes frequency shifts in only one of the resonances, allowing a new approach of using the difference between the two frequencies to be used to measure mass attachment; this reduces the importance of device-to-device variability in absolute resonant frequency as a result of device fabrication.
Description
Keywords
0903 Biomedical Engineering
Journal Title
Nanoscale
Conference Name
Journal ISSN
2040-3364
2040-3372
2040-3372
Volume Title
10
Publisher
Royal Society of Chemistry (RSC)
Publisher DOI
Sponsorship
Cancer Research UK Cambridge Institute Early Detection Programme Pump-Priming 2016 award.
Cambridge Commonwealth Trusts.