Split resonances for simultaneous detection and control measurements in a single bulk acoustic wave (BAW) sensor.
Royal Society of Chemistry (RSC)
MetadataShow full item record
Wajs, E., Rughoobur, G., & Flewitt, A. (2018). Split resonances for simultaneous detection and control measurements in a single bulk acoustic wave (BAW) sensor.. Nanoscale, 10 (30), 14395-14399. https://doi.org/10.1039/c8nr04665d
A self-referenced resonator consisting of two distinct areas of the top electrode made from Mo and a thin (5-30 nm) functional Au layer is shown. The fundamental frequencies for both the shear (~1 GHz) and longitudinal (~2 GHz) are split in two, such that mass attachment on the functional layer region causes frequency shifts in only one of the resonances, allowing a new approach of using the difference between the two frequencies to be used to measure mass attachment; this reduces the importance of device-to-device variability in absolute resonant frequency as a result of device fabrication.
Cancer Research UK Cambridge Institute Early Detection Programme Pump-Priming 2016 award. Cambridge Commonwealth Trusts.
External DOI: https://doi.org/10.1039/c8nr04665d
This record's URL: https://www.repository.cam.ac.uk/handle/1810/284510
Attribution 4.0 International
Licence URL: https://creativecommons.org/licenses/by/4.0/