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Split resonances for simultaneous detection and control measurements in a single bulk acoustic wave (BAW) sensor.

Published version
Peer-reviewed

Type

Article

Change log

Abstract

A self-referenced resonator consisting of two distinct areas of the top electrode made from Mo and a thin (5-30 nm) functional Au layer is shown. The fundamental frequencies for both the shear (∼1 GHz) and longitudinal (∼2 GHz) modes are split in two, such that mass attachment on the functional layer region causes frequency shifts in only one of the resonances, allowing a new approach of using the difference between the two frequencies to be used to measure mass attachment; this reduces the importance of device-to-device variability in absolute resonant frequency as a result of device fabrication.

Description

Keywords

0903 Biomedical Engineering

Journal Title

Nanoscale

Conference Name

Journal ISSN

2040-3364
2040-3372

Volume Title

10

Publisher

Royal Society of Chemistry (RSC)
Sponsorship
Cancer Research UK Cambridge Institute Early Detection Programme Pump-Priming 2016 award. Cambridge Commonwealth Trusts.