Acoustic mode confinement using coupled cavity structures in UHF unreleased MEMS resonators
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Publication Date
2019Journal Title
Microsystem Technologies
ISSN
0946-7076
Publisher
Springer Science and Business Media LLC
Volume
25
Issue
3
Pages
777-787
Type
Article
Metadata
Show full item recordCitation
Erbes, A., Wang, W., Weinstein, D., & Seshia, A. (2019). Acoustic mode confinement using coupled cavity structures in UHF unreleased MEMS resonators. Microsystem Technologies, 25 (3), 777-787. https://doi.org/10.1007/s00542-018-4118-5
Abstract
This papers investigates device approaches towards
the confinement of acoustic modes in unreleased UHF MEMS
resonators. Acoustic mode confinement is achieved using specially
designed mechanically coupled acoustic cavities known as Acoustic
Bragg Grating Coupler (ABGC) structures to spatially localize
the vibration energy within the resonators and thereby improve
the motional impedance (Rx) and mechanical quality factor (Q).
This enhancement in the mechanical response is demonstrated
with numerical simulations using distinct unreleased resonator
technologies involving dielectric transduction mechanisms. These
initial investigations show improvements in the Q as well as
enhanced vibrational amplitudes within the resonator domains
(i.e. translating to improved Rx values) in the case of coupled
cavities as opposed to single cavity designs. An initial approach
to fabricate the devices in a CMOS compatible dual-trench
technology are presented.
Sponsorship
Qualcomm European Research Studentship Fund in Technology
US National Science Foundation
Funder references
Engineering and Physical Sciences Research Council (EP/K000314/1)
Engineering and Physical Sciences Research Council (EP/L010917/1)
Engineering and Physical Sciences Research Council (EP/I019308/1)
Engineering and Physical Sciences Research Council (EP/N021614/1)
Identifiers
External DOI: https://doi.org/10.1007/s00542-018-4118-5
This record's URL: https://www.repository.cam.ac.uk/handle/1810/285083
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