Acoustic mode confinement using coupled cavity structures in UHF unreleased MEMS resonators

Authors
Erbes, A 
Wang, W 
Weinstein, D 

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Article
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Abstract

This papers investigates device approaches towards the confinement of acoustic modes in unreleased UHF MEMS resonators. Acoustic mode confinement is achieved using specially designed mechanically coupled acoustic cavities known as Acoustic Bragg Grating Coupler (ABGC) structures to spatially localize the vibration energy within the resonators and thereby improve the motional impedance (Rx) and mechanical quality factor (Q). This enhancement in the mechanical response is demonstrated with numerical simulations using distinct unreleased resonator technologies involving dielectric transduction mechanisms. These initial investigations show improvements in the Q as well as enhanced vibrational amplitudes within the resonator domains (i.e. translating to improved Rx values) in the case of coupled cavities as opposed to single cavity designs. An initial approach to fabricate the devices in a CMOS compatible dual-trench technology are presented.

Publication Date
2019
Online Publication Date
2018-09-06
Acceptance Date
2018-08-27
Keywords
40 Engineering, 4009 Electronics, Sensors and Digital Hardware, Bioengineering
Journal Title
Microsystem Technologies
Journal ISSN
0946-7076
1432-1858
Volume Title
25
Publisher
Springer Science and Business Media LLC
Sponsorship
Engineering and Physical Sciences Research Council (EP/K000314/1)
Engineering and Physical Sciences Research Council (EP/L010917/1)
Engineering and Physical Sciences Research Council (EP/I019308/1)
Engineering and Physical Sciences Research Council (EP/N021614/1)
Qualcomm European Research Studentship Fund in Technology US National Science Foundation