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dc.contributor.authorErbes, A
dc.contributor.authorWang, W
dc.contributor.authorWeinstein, D
dc.contributor.authorSeshia, Ashwin
dc.date.accessioned2018-11-14T00:32:22Z
dc.date.available2018-11-14T00:32:22Z
dc.date.issued2019-03
dc.identifier.issn0946-7076
dc.identifier.urihttps://www.repository.cam.ac.uk/handle/1810/285083
dc.description.abstractThis papers investigates device approaches towards the confinement of acoustic modes in unreleased UHF MEMS resonators. Acoustic mode confinement is achieved using specially designed mechanically coupled acoustic cavities known as Acoustic Bragg Grating Coupler (ABGC) structures to spatially localize the vibration energy within the resonators and thereby improve the motional impedance (Rx) and mechanical quality factor (Q). This enhancement in the mechanical response is demonstrated with numerical simulations using distinct unreleased resonator technologies involving dielectric transduction mechanisms. These initial investigations show improvements in the Q as well as enhanced vibrational amplitudes within the resonator domains (i.e. translating to improved Rx values) in the case of coupled cavities as opposed to single cavity designs. An initial approach to fabricate the devices in a CMOS compatible dual-trench technology are presented.
dc.description.sponsorshipQualcomm European Research Studentship Fund in Technology US National Science Foundation
dc.publisherSpringer Science and Business Media LLC
dc.rightsAttribution 4.0 International
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/
dc.titleAcoustic mode confinement using coupled cavity structures in UHF unreleased MEMS resonators
dc.typeArticle
prism.endingPage787
prism.issueIdentifier3
prism.publicationDate2019
prism.publicationNameMicrosystem Technologies
prism.startingPage777
prism.volume25
dc.identifier.doi10.17863/CAM.32453
dcterms.dateAccepted2018-08-27
rioxxterms.versionofrecord10.1007/s00542-018-4118-5
rioxxterms.licenseref.urihttp://www.rioxx.net/licenses/all-rights-reserved
rioxxterms.licenseref.startdate2019-03-04
dc.contributor.orcidSeshia, Ashwin [0000-0001-9305-6879]
dc.identifier.eissn1432-1858
rioxxterms.typeJournal Article/Review
pubs.funder-project-idEngineering and Physical Sciences Research Council (EP/K000314/1)
pubs.funder-project-idEngineering and Physical Sciences Research Council (EP/L010917/1)
pubs.funder-project-idEngineering and Physical Sciences Research Council (EP/I019308/1)
pubs.funder-project-idEngineering and Physical Sciences Research Council (EP/N021614/1)
cam.issuedOnline2018-09-06


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Attribution 4.0 International
Except where otherwise noted, this item's licence is described as Attribution 4.0 International