Constant Temperature Operation of a CMOS MEMS Thermoelectronic Multidirectional Flow Sensor

Thumbnail
View / Open Files
Authors
  De Luca, Andrea
  Coull, John
  Udrea, Florin
IEEE,
Publication Date
2017
Journal Title
2017 IEEE SENSORS
ISSN
1930-0395
Pages
346-348
Type
Conference Object
Metadata
Show full item record
Citation
De Luca, A., Coull, J., Udrea, F., & IEEE,. (2017). Constant Temperature Operation of a CMOS MEMS Thermoelectronic Multidirectional Flow Sensor. 2017 IEEE SENSORS, 346-348. https://doi.org/10.17863/CAM.33257
Keywords
Flow Sensor, Silicon-on-Insulator, CMOS, MEMS, Diode Temperature Sensor, Wall Shear Stress
Identifiers
This record's DOI: https://doi.org/10.17863/CAM.33257
This record's URL: https://www.repository.cam.ac.uk/handle/1810/285930

Rights
Licence:
http://www.rioxx.net/licenses/all-rights-reserved