Constant Temperature Operation of a CMOS MEMS Thermoelectronic Multidirectional Flow Sensor

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Authors
  De Luca, Andrea
  Coull, John
  Udrea, Florin
IEEE
Publication Date
2017
Journal Title
2017 IEEE SENSORS
ISSN
1930-0395
Pages
346-348
Type
Conference Object
Metadata
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Citation
De Luca, A., Coull, J., Udrea, F., & IEEE. (2017). Constant Temperature Operation of a CMOS MEMS Thermoelectronic Multidirectional Flow Sensor. 2017 IEEE SENSORS, 346-348. https://doi.org/10.17863/CAM.33257
Keywords
Flow Sensor, Silicon-on-Insulator, CMOS, MEMS, Diode Temperature Sensor, Wall Shear Stress
Identifiers
External DOI: https://doi.org/10.17863/CAM.33257
This record's URL: https://www.repository.cam.ac.uk/handle/1810/285930
Rights
Licence:
http://www.rioxx.net/licenses/all-rights-reserved
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