Constant Temperature Operation of a CMOS MEMS Thermoelectronic Multidirectional Flow Sensor

De Luca, Andrea; Coull, John D; Udrea, Florin

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Authors

De Luca, Andrea

Coull, John D

Udrea, Florin

Publication Date

2017

Journal Title

2017 IEEE SENSORS

ISSN

1930-0395

Pages

346-348

Type

Conference Object

Metadata

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Citation

De Luca, A., Coull, J. D., & Udrea, F. (2017). Constant Temperature Operation of a CMOS MEMS Thermoelectronic Multidirectional Flow Sensor. 2017 IEEE SENSORS, 346-348. https://doi.org/10.17863/CAM.33257

Keywords

Flow Sensor, Silicon-on-Insulator, CMOS, MEMS, Diode Temperature Sensor, Wall Shear Stress

Identifiers

External DOI: https://doi.org/10.17863/CAM.33257

This record's URL: https://www.repository.cam.ac.uk/handle/1810/285930

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http://www.rioxx.net/licenses/all-rights-reserved

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