Constant Temperature Operation of a CMOS MEMS Thermoelectronic Multidirectional Flow Sensor

Constant Temperature Operation of a CMOS MEMS Thermoelectronic Multidirectional Flow Sensor

Accepted version

Peer-reviewed

Repository URI

https://www.repository.cam.ac.uk/handle/1810/285930

Repository DOI

https://doi.org/10.17863/CAM.33257

Files

Accepted version (808.96 KB)

Type

Conference Object

Authors

De Luca, Andrea

https://orcid.org/0000-0002-9481-4747

Coull, John D

Udrea, Florin

https://orcid.org/0000-0002-7288-3370

Keywords

Flow Sensor, Silicon-on-Insulator, CMOS, MEMS, Diode Temperature Sensor, Wall Shear Stress

Journal Title

2017 IEEE SENSORS

Journal ISSN

1930-0395

Publisher DOI

https://doi.org/10.17863/CAM.33257

Rights

http://www.rioxx.net/licenses/all-rights-reserved

Collections

Cambridge University Research Outputs