Single-Step Fabrication of Multispectral Filter Arrays Using Grayscale Lithography and Metal-Insulator-Metal Geometry

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Authors
Williams, C
Gordon, GSD
Wilkinson, TD
Bohndiek, SE
Publication Date
2018
Journal Title
2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings
Conference Name
CLEO: Science and Innovations
ISSN
2160-9020
ISBN
9781943580422
Publisher
OSA
Type
Conference Object
This Version
AM
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Citation
Williams, C., Gordon, G., Wilkinson, T., & Bohndiek, S. (2018). Single-Step Fabrication of Multispectral Filter Arrays Using Grayscale Lithography and Metal-Insulator-Metal Geometry. 2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings https://doi.org/10.1364/CLEO_SI.2018.STh1I.2
Abstract
© 2018 OSA. Metal-insulator-metal geometries can provide optical transmission filtering, with peak wavelength dependent on insulator thickness. Using grayscale electron beam lithography to control insulator thickness, we fabricate multispectral filter arrays, whereby dose determines wavelength.
Sponsorship
Cancer Research UK (21102)
Cancer Research UK (24669)
Identifiers
External DOI: https://doi.org/10.1364/CLEO_SI.2018.STh1I.2
This record's URL: https://www.repository.cam.ac.uk/handle/1810/286813
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Licence:
http://www.rioxx.net/licenses/all-rights-reserved
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