Single-Step Fabrication of Multispectral Filter Arrays Using Grayscale Lithography and Metal-Insulator-Metal Geometry

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Authors
  Williams, Calum
  Gordon, George
  Wilkinson, Timothy
  Bohndiek, Sarah
Publication Date
2018-08-06
Journal Title
2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings
ISSN
2160-9020
ISBN
9781943580422
Type
Conference Object
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AM
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Citation
Williams, C., Gordon, G., Wilkinson, T., & Bohndiek, S. (2018). Single-Step Fabrication of Multispectral Filter Arrays Using Grayscale Lithography and Metal-Insulator-Metal Geometry. 2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings https://doi.org/10.17863/CAM.34120
Abstract
© 2018 OSA. Metal-insulator-metal geometries can provide optical transmission filtering, with peak wavelength dependent on insulator thickness. Using grayscale electron beam lithography to control insulator thickness, we fabricate multispectral filter arrays, whereby dose determines wavelength.
Sponsorship
Cancer Research UK (21102)
Cancer Research UK (24669)
Identifiers
This record's DOI: https://doi.org/10.17863/CAM.34120
This record's URL: https://www.repository.cam.ac.uk/handle/1810/286813

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