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dc.contributor.authorPandit, Milind
dc.contributor.authorZhao, Chun
dc.contributor.authorSobreviela, Guillermo
dc.contributor.authorMustafazade, Arif
dc.contributor.authorDu, Sijun
dc.contributor.authorZou, Xudong
dc.contributor.authorSeshia, Ashwin A
dc.date.accessioned2018-12-13T00:32:16Z
dc.date.available2018-12-13T00:32:16Z
dc.date.issued2018-10-26
dc.identifier.issn0885-3010
dc.identifier.urihttps://www.repository.cam.ac.uk/handle/1810/286831
dc.description.abstractThis paper presents results from the closed-loop characterization of an electrically coupled mode-localized sensor topology including measurements of amplitude ratios over long duration, stability, noise floor and the bandwidth of operation. The sensitivity of the prototype sensor is estimated to be -5250 in the linear operation regime. An input-referred stability of 84ppb with respect to normalized stiffness perturbations is achieved at 500s. When compared to frequency shift sensing within the same device, amplitude ratio sensing provides higher resolution for long term measurements due to the intrinsic common mode rejection properties of a mode-localized system. A theoretical framework is established to quantify noise floor associated with measurements validated through numerical simulations and experimental data. In addition, the operating bandwidth of the sensor is found to be 3.5Hz for 3dB flatness.
dc.languageeng
dc.publisherIEEE
dc.titleClosed-loop Characterization of Noise and Stability in a Mode-localized Resonant MEMS Sensor.
dc.typeArticle
prism.publicationDate2018
prism.publicationNameIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
dc.identifier.doi10.17863/CAM.34138
dcterms.dateAccepted2018-10-22
rioxxterms.versionofrecord10.1109/TUFFC.2018.2878241
rioxxterms.versionAM
rioxxterms.licenseref.urihttp://www.rioxx.net/licenses/all-rights-reserved
rioxxterms.licenseref.startdate2018-10-26
dc.contributor.orcidPandit, Milind Narasimha [0000-0002-7862-7984]
dc.contributor.orcidDu, Sijun [0000-0001-6238-4423]
dc.contributor.orcidSeshia, Ashwin [0000-0001-9305-6879]
dc.identifier.eissn1525-8955
rioxxterms.typeJournal Article/Review
pubs.funder-project-idNatural Environment Research Council (NE/N012097/1)
pubs.funder-project-idEngineering and Physical Sciences Research Council (EP/I019308/1)
pubs.funder-project-idEngineering and Physical Sciences Research Council (EP/K000314/1)
pubs.funder-project-idEngineering and Physical Sciences Research Council (EP/L010917/1)
pubs.funder-project-idEngineering and Physical Sciences Research Council (EP/N021614/1)
cam.issuedOnline2018-10-26
rioxxterms.freetoread.startdate2019-10-26


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