CMOS MEMS Hot-Film Thermoelectronic Flow Sensor
Authors
Udrea, F
Change log
Description
Publication Date
2017
Online Publication Date
2017-10-19
Acceptance Date
Keywords
Sensor phenomena, flow sensor, silicon-on-insulator, complementary metal-oxide semiconductor (CMOS), microelectromechanical system (MEMS), diode temperature sensor, wall shear stress
Journal Title
IEEE Sensors Letters
Journal ISSN
2475-1472
2475-1472
2475-1472
Volume Title
1
Publisher
Institute of Electrical and Electronics Engineers (IEEE)