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dc.contributor.authorMansoor, Mohtashim
dc.contributor.authorHaneef, Ibraheem
dc.contributor.authorAkhtar, Suhail
dc.contributor.authorRafiq, Muhammad Aftab
dc.contributor.authorDe Luca, Andrea
dc.contributor.authorAli, Syed Zeeshan
dc.contributor.authorUdrea, Florin
dc.date.accessioned2018-12-14T00:30:15Z
dc.date.available2018-12-14T00:30:15Z
dc.date.issued2016-11-04
dc.identifier.issn1424-8220
dc.identifier.urihttps://www.repository.cam.ac.uk/handle/1810/286875
dc.description.abstractAn SOI CMOS multi-sensor MEMS chip, which can simultaneously measure temperature, pressure and flow rate, has been reported. The multi-sensor chip has been designed keeping in view the requirements of researchers interested in experimental fluid dynamics. The chip contains ten thermodiodes (temperature sensors), a piezoresistive-type pressure sensor and nine hot film-based flow rate sensors fabricated within the oxide layer of the SOI wafers. The silicon dioxide layers with embedded sensors are relieved from the substrate as membranes with the help of a single DRIE step after chip fabrication from a commercial CMOS foundry. Very dense sensor packing per unit area of the chip has been enabled by using technologies/processes like SOI, CMOS and DRIE. Independent apparatuses were used for the characterization of each sensor. With a drive current of 10 µA-0.1 µA, the thermodiodes exhibited sensitivities of 1.41 mV/°C-1.79 mV/°C in the range 20-300 °C. The sensitivity of the pressure sensor was 0.0686 mV/(Vexcit kPa) with a non-linearity of 0.25% between 0 and 69 kPa above ambient pressure. Packaged in a micro-channel, the flow rate sensor has a linearized sensitivity of 17.3 mV/(L/min)-0.1 in the tested range of 0-4.7 L/min. The multi-sensor chip can be used for simultaneous measurement of fluid pressure, temperature and flow rate in fluidic experiments and aerospace/automotive/biomedical/process industries.
dc.format.mediumElectronic
dc.languageeng
dc.publisherMDPI AG
dc.rightsAttribution 4.0 International
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/
dc.titleAn SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications.
dc.typeArticle
prism.issueIdentifier11
prism.publicationDate2016
prism.publicationNameSensors (Basel)
prism.volume16
dc.identifier.doi10.17863/CAM.34184
dcterms.dateAccepted2016-09-02
rioxxterms.versionofrecord10.3390/s16111608
rioxxterms.versionVoR
rioxxterms.licenseref.urihttp://www.rioxx.net/licenses/all-rights-reserved
rioxxterms.licenseref.startdate2016-11-04
dc.contributor.orcidDe Luca, Andrea [0000-0002-9481-4747]
dc.contributor.orcidUdrea, Florin [0000-0002-7288-3370]
dc.identifier.eissn1424-8220
rioxxterms.typeJournal Article/Review
pubs.funder-project-idEuropean Commission (288481)
cam.issuedOnline2016-11-04


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Attribution 4.0 International
Except where otherwise noted, this item's licence is described as Attribution 4.0 International