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2D and 3D thermal flow sensor modelling-A comparative analysis

Accepted version
Peer-reviewed

Type

Conference Object

Change log

Authors

Gardner, ELW 

Description

Keywords

Numerical Modelling, Flow Sensor, MEMS, CMOS

Journal Title

Proceedings of the International Semiconductor Conference, CAS

Conference Name

2017 International Semiconductor Conference (CAS)

Journal ISSN

1545-827X

Volume Title

2017-October

Publisher

IEEE