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Towards Integrated Mid-Infrared Gas Sensors.

Published version
Peer-reviewed

Repository DOI


Type

Article

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Authors

Udrea, Florin 

Abstract

Optical gas sensors play an increasingly important role in many applications. Sensing techniques based on mid-infrared absorption spectroscopy offer excellent stability, selectivity and sensitivity, for numerous possibilities expected for sensors integrated into mobile and wearable devices. Here we review recent progress towards the miniaturization and integration of optical gas sensors, with a focus on low-cost and low-power consumption devices.

Description

Keywords

CMOS, MEMS, gas sensors, integrated sensors, mid-infrared

Journal Title

Sensors (Basel)

Conference Name

Journal ISSN

1424-8220
1424-8220

Volume Title

19

Publisher

MDPI AG