Towards Integrated Mid-Infrared Gas Sensors.
Published version
Peer-reviewed
Repository URI
Repository DOI
Change log
Authors
Popa, Daniel https://orcid.org/0000-0002-5708-743X
Udrea, Florin
Abstract
Optical gas sensors play an increasingly important role in many applications. Sensing techniques based on mid-infrared absorption spectroscopy offer excellent stability, selectivity and sensitivity, for numerous possibilities expected for sensors integrated into mobile and wearable devices. Here we review recent progress towards the miniaturization and integration of optical gas sensors, with a focus on low-cost and low-power consumption devices.
Description
Keywords
CMOS, MEMS, gas sensors, integrated sensors, mid-infrared
Journal Title
Sensors (Basel)
Conference Name
Journal ISSN
1424-8220
1424-8220
1424-8220
Volume Title
19
Publisher
MDPI AG