Reduction of Amplitude Ratio Dependence on Drive Level in Mode Localized Resonant MEMS Sensors

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Authors

Pandit, Milind

Zhao, Chun

Sobreviela, Guillermo

Mustafazade, Arif

  Seshia, Ashwin

IEEE,

Publication Date

2017

Journal Title

2017 IEEE SENSORS

ISSN

1930-0395

Pages

4-6

Language

English

Type

Conference Object

This Version

AM

Metadata

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Citation

Pandit, M., Zhao, C., Sobreviela, G., Mustafazade, A., Seshia, A., & IEEE,. (2017). Reduction of Amplitude Ratio Dependence on Drive Level in Mode Localized Resonant MEMS Sensors. 2017 IEEE SENSORS, 4-6. https://doi.org/10.17863/CAM.43054

Keywords

MEMS, Mode localization, Resonators, Veering, Resolution

Identifiers

This record's DOI: https://doi.org/10.17863/CAM.43054

This record's URL: https://www.repository.cam.ac.uk/handle/1810/296009



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