Reduction of Amplitude Ratio Dependence on Drive Level in Mode Localized Resonant MEMS Sensors
Accepted version
Peer-reviewed
Repository URI
Repository DOI
Change log
Authors
Pandit, Milind
Zhao, Chun
Sobreviela, Guillermo
Mustafazade, Arif
Seshia, Ashwin A
Description
Keywords
MEMS, Mode localization, Resonators, Veering, Resolution
Journal Title
2017 IEEE SENSORS
Conference Name
Journal ISSN
1930-0395