Reduction of Amplitude Ratio Dependence on Drive Level in Mode Localized Resonant MEMS Sensors
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Authors
Pandit, Milind
Zhao, Chun
Sobreviela, Guillermo
Mustafazade, Arif
Seshia, Ashwin A
Publication Date
2017Journal Title
2017 IEEE SENSORS
ISSN
1930-0395
Pages
4-6
Language
English
Type
Conference Object
This Version
AM
Metadata
Show full item recordCitation
Pandit, M., Zhao, C., Sobreviela, G., Mustafazade, A., & Seshia, A. A. (2017). Reduction of Amplitude Ratio Dependence on Drive Level in Mode Localized Resonant MEMS Sensors. 2017 IEEE SENSORS, 4-6. https://doi.org/10.17863/CAM.43054
Keywords
MEMS, Mode localization, Resonators, Veering, Resolution
Identifiers
External DOI: https://doi.org/10.17863/CAM.43054
This record's URL: https://www.repository.cam.ac.uk/handle/1810/296009
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Licence:
http://www.rioxx.net/licenses/all-rights-reserved
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