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Reduction of Amplitude Ratio Dependence on Drive Level in Mode Localized Resonant MEMS Sensors

Accepted version
Peer-reviewed

Type

Conference Object

Change log

Authors

Pandit, Milind 
Zhao, Chun 
Sobreviela, Guillermo 
Mustafazade, Arif 
Seshia, Ashwin A 

Description

Keywords

MEMS, Mode localization, Resonators, Veering, Resolution

Journal Title

2017 IEEE SENSORS

Conference Name

Journal ISSN

1930-0395

Volume Title

Publisher