Reduction of Amplitude Ratio Dependence on Drive Level in Mode Localized Resonant MEMS Sensors
dc.contributor.author | Pandit, Milind | |
dc.contributor.author | Zhao, Chun | |
dc.contributor.author | Sobreviela, Guillermo | |
dc.contributor.author | Mustafazade, Arif | |
dc.contributor.author | Seshia, Ashwin | |
dc.contributor.author | IEEE | |
dc.date.accessioned | 2019-08-20T11:31:30Z | |
dc.date.available | 2019-08-20T11:31:30Z | |
dc.date.issued | 2017 | |
dc.identifier.issn | 1930-0395 | |
dc.identifier.uri | https://www.repository.cam.ac.uk/handle/1810/296009 | |
dc.language.iso | en | |
dc.subject | MEMS | |
dc.subject | Mode localization | |
dc.subject | Resonators | |
dc.subject | Veering | |
dc.subject | Resolution | |
dc.title | Reduction of Amplitude Ratio Dependence on Drive Level in Mode Localized Resonant MEMS Sensors | |
dc.type | Conference Object | |
prism.endingPage | 6 | |
prism.publicationDate | 2017 | |
prism.publicationName | 2017 IEEE SENSORS | |
prism.startingPage | 4 | |
dc.identifier.doi | 10.17863/CAM.43054 | |
rioxxterms.versionofrecord | 10.17863/CAM.43054 | |
rioxxterms.version | AM | |
rioxxterms.licenseref.uri | http://www.rioxx.net/licenses/all-rights-reserved | |
rioxxterms.licenseref.startdate | 2017 | |
dc.contributor.orcid | Seshia, Ashwin [0000-0001-9305-6879] | |
rioxxterms.type | Conference Paper/Proceeding/Abstract |
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