Reduction of Amplitude Ratio Dependence on Drive Level in Mode Localized Resonant MEMS Sensors

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dc.contributor.authorPandit, Milind
dc.contributor.authorZhao, Chun
dc.contributor.authorSobreviela, Guillermo
dc.contributor.authorMustafazade, Arif
dc.contributor.authorSeshia, Ashwin
dc.contributor.authorIEEE
dc.date.accessioned2019-08-20T11:31:30Z
dc.date.available2019-08-20T11:31:30Z
dc.date.issued2017
dc.identifier.issn1930-0395
dc.identifier.urihttps://www.repository.cam.ac.uk/handle/1810/296009
dc.language.isoen
dc.subjectMEMS
dc.subjectMode localization
dc.subjectResonators
dc.subjectVeering
dc.subjectResolution
dc.titleReduction of Amplitude Ratio Dependence on Drive Level in Mode Localized Resonant MEMS Sensors
dc.typeConference Object
prism.endingPage6
prism.publicationDate2017
prism.publicationName2017 IEEE SENSORS
prism.startingPage4
dc.identifier.doi10.17863/CAM.43054
rioxxterms.versionofrecord10.17863/CAM.43054
rioxxterms.versionAM
rioxxterms.licenseref.urihttp://www.rioxx.net/licenses/all-rights-reserved
rioxxterms.licenseref.startdate2017
dc.contributor.orcidSeshia, Ashwin [0000-0001-9305-6879]
rioxxterms.typeConference Paper/Proceeding/Abstract


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